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    RT Series Two-Stage

    Refrigerant Screw Compressor

    RC2 Semi-Hermetic RC2-AV VFD Semi-Hermetic RC2-AVI VFD With Automatically Adjustable VI RC2-ExP Explosion-Proof Semi-Hermetic RE High Efficiency RE-V VFD Semi-Hermetic RE-VI VFD With Automatically Adjustable VI RG Open Type LB Low Temperature LT Two Stage

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    PS Series PD Series IPH Series

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    AE/AA Air Screw Compressor AM Inverter driving SDS HITACHI OIL-FREE
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    RT Centrifugal Compressors

    Centrifugal Compressors

    REFRIGERANT SCREW COMPRESSOR

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    P Dry Vacuum Pump

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  • RT Centrifugal Compressors
    • RT Series Two-Stage
  • Refrigerant Screw Compressor
    • RC2 Semi-Hermetic
    • RC2-AV VFD Semi-Hermetic
    • RC2-AVI VFD
      Automatically Adjustable VI
    • RC2-ExP Explosion-Proof
      Semi-Hermetic
    • RE High Efficiency
    • RE-V VFD Semi-Hermetic
    • RE-VI VFD
      Automatically Adjustable VI
    • RG Open Type
    • LB Low Temperature
    • LT Two Stage
  • P Dry Vacuum Pump
    • PS Series
    • PD Series
    • IPH Series
  • Screw Air Compressor
    • AE/AA Air Screw Compressor
    • AM Inverter Driving
    • SDS HITACHI OIL-FREE

    IPH Series For Harsh Processes


    Features:

    Designed by HANBELL and 100% made in Taiwan

    25% power saving than previous version and Green mode equipped

    Thermal control solution to avoid cold spat inside of pump

    Optimize pump size, easy for plug and play

    IPH





    Application:
    Etch
    Implant
    HDP-CVD
    SACVD
    MOCVD
    PECVD
    LPCVD
    ALD




      Technical
      Data :


      Specification / Model

      iPH100

      iPH200

      iPH610

      iPH1210

      iPH1220

      iPH1820

      Max.Pumping Speed (m³/h)

      120

      200

      700

      1100

      1250

      1850

      Ultimate Pressure (Torr)

      7.5 x 10-3

      7.5 x 10-4

      Power Consumption (kW)

      2.1

      3.5

      2.6

      3

      4.5

      4.7

      Dimensions (mm)

      L

      816

      816

      816

      816

      816

      860

      W

      390

      390

      390

      390

      390

      400

      H

      526

      526

      780

      780

      780

      780





      Pumping Curve
      :
       
      Pumping Curve