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| IPH Series For Harsh Processes |
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Designed by HANBELL and 100% made in Taiwan 25% power saving than previous version and
Green mode equipped Thermal control solution to avoid cold spat
inside of pump Optimize pump size, easy for plug and play
Etch Implant HDP-CVD SACVD MOCVD PECVD
LPCVD
ALD
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Specification / Model |
iPH100 |
iPH200 |
iPH610 |
iPH1210 |
iPH1220 |
iPH1820 |
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Max.Pumping Speed (m³/h) |
120 |
200 |
700 |
1100 |
1250 |
1850 |
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Ultimate Pressure (Torr) |
7.5 x 10-3 |
7.5 x 10-4 |
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Power Consumption (kW) |
2.1 |
3.5 |
2.6 |
3 |
4.5 |
4.7 |
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Dimensions (mm) |
L |
816 |
816 |
816 |
816 |
816 |
860 |
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W |
390 |
390 |
390 |
390 |
390 |
400 |
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|
H |
526 |
526 |
780 |
780 |
780 |
780 |
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